专利名称：Self-calibrating accelerometer
发明人：White, Craig W.,Behr, Leonard W.,Musser,
Kevin E.
申请号：EP89308436.8申请日：19890821公开号：EP0368446B1公开日：19931110
摘要：An acceleration sensor having a sensing mass supported relative to a frame by aplurality of beams having a plurality of resistors integral therewith. The resistance of thebeam resistors varies as the sensing mass is displaced relative to the frame in responseto acceleration of the frame in a direction generally normal to the plane of beamextension. The displacement of the sensing mass due to such acceleration produces acorresponding change in the output of a Wheatstone bridge incorporating the beamresistors in the legs thereof. At least one leg of the bridge additionally has a resistor ofvariable resistance in series with the beam resistor thereof, the resistance of which iscontrolled by a microprocessor, whereby the bridge output is adjusted to compensatefor temperature effects and manufacturing tolerances. The output of the electricalcontrol circuit for the sensor is periodically calibrated by electrostatically deflecting thesensing mass relative to the frame, whereby the sensing mass is subjected to theequivalent of a known accelerating field, and using the resultant change in bridge outputas a reference value for calibrating the instantaneous changes in bridge output resultingfrom the acceleration of the sensor frame.
申请人：AUTOMOTIVE SYSTEMS LAB
地址：US
国籍：US
代理机构：Senior, Alan Murray
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