专利名称：IMPROVED GRINDING MACHINE发明人：BENT, Russell, Graham申请号：EP98951580.4申请日：19981102公开号：EP1034064B1公开日：20020116
摘要：A grinding machine, in particular a face grinder for grinding the faces of siliconwafers, has a grinding wheel spindle (20) and a work spindle (22) which are mounted so asto be pivotal about axes (A and B) respectively, each axis being perpendicular to therotational axis of its respective spindle and being orthogonal to the rotation axis of theother spindle. Three sensors or probes (1 to 3) are provided to measure the position ofone spindle relative to the other and to generate signals for controlling servo motors(26, 28) for adjusting the angular orientation of each spindle about its pivotal axis.
申请人：UNOVA UK LTD
地址：GB
国籍：GB
代理机构：Nash, Keith Wilfrid
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